Miniature Linear Stage with Biphase Inertia Drive for Precision and Long-Term Stability in the Smallest Spaces

PI’s new B-421 BIX miniature linear stage offers precision and long-term stability in a compact, flexible design.

The integrated piezoelectric biphase inertia drive (BIX) utilizes the stick-slip principle to perform the smallest movements highly dynamically at velocities of up to 14 mm/s. With a minimum incremental motion of 10 nm and a resolution of up to 6 nm, the miniature linear stage is ideal for demanding positioning applications requiring precision in the nanometer range, such as aligning optical components for beam manipulation. The integrated self-locking mechanics ensure position stability, which is particularly advantageous for long-term stable measurement and alignment processes.

Compact and Flexible Design

With dimensions of just 25 × 29 × 11 mm and its stackable design, the B‑421 BIX miniature linear stage can be easily combined with multi-axis systems. This flexibility makes it an ideal solution for complex positioning and alignment applications.

High Payload in Miniature Format

With a maximum drive force of 2.5 N, the B‑421 BIX linear stage can also handle tasks requiring precise motion under mechanical load. Its maximum payload is 0.5 kg in the XY direction and 0.15 kg in the Z direction. The stage is controlled via the E-881 BIX motion controller, which is optimally matched to the drive technology.

For Demanding High-Tech Applications

With features such as high positioning accuracy, outstanding resolution, and long-term stability in tight spaces, this miniature linear stage meets the most demanding requirements of complex industrial and microscopic applications. It precisely positions optical elements for exact beam shaping and ‑steering. In the semiconductor industry, this application is particularly used for the quality control of microchips. In microscopy, precisely steering the light beam is essential for modern, high-resolution methods, such as TIRF or STED microscopy.

Physik Instrumente (PI) in Brief

PI with headquarters in Karlsruhe, Germany, is the market and technology leader for high-precision positioning technology and piezo applications in the market segments of Industrial Automation, Photonics, Semiconductor, and Microscopy & Life Sciences. In close cooperation with customers from all over the world, PI's more than 1,900 specialists have been continuously pushing the boundaries of what is technically feasible for more than fifty years. Various drive technologies, internally developed sensor technology, electronics, and control technology provide the basis for this. PI’s portfolio ranges from components to subsystems to tailor-made complete solutions. More than 560 granted and pending patents underline the company’s claim to leadership in the fields of precision positioning and piezo technology. PI operates on a global scale, with nine production sites in Europe, North America, and Asia, as well as sixteen sales and service subsidiaries.